Get Analysis and Design Principles of MEMS Devices PDF

By Minhang Bao

ISBN-10: 0444516166

ISBN-13: 9780444516169

ISBN-10: 1493302310

ISBN-13: 9781493302314

Sensors and actuators at the moment are a part of our way of life and seem in lots of home equipment, reminiscent of vehicles, merchandising machines and washing machines. MEMS (Micro Electro Mechanical structures) are micro platforms which includes micro mechanical sensors, actuators and micro digital circuits. a number of MEMS units were constructed and lots of mass produced, however the details on those is largely dispersed within the literature. This ebook offers the research and layout rules of MEMS units. the data is finished, concentrating on microdynamics, resembling the mechanics of beam and diaphragm buildings, air damping and its impression at the movement of mechanical buildings. utilizing functional examples, the writer examines difficulties linked to research and layout, and ideas are incorporated behind the e-book. definitely the right complex point textbook for graduates, Analysis and layout ideas of MEMS Devices is an appropriate resource of reference for researchers and engineers within the field.

* provides the research and layout ideas of MEMS units extra systematically than ever before.

* comprises the theories crucial for the research and layout of MEMS contains the dynamics of micro mechanical structures

* an issue part is incorporated on the finish of every bankruptcy with solutions supplied on the finish of the book.

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Analysis and Design Principles of MEMS Devices by Minhang Bao

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